how to clear KLA SP haze TIR clipping flag at the wafer edge exclusion zone

By Sai Kiran Pandrala · Last verified: 2026-06-01 · Source: in-controller diagnostic help, controls-community forums (r/PLC, r/Robotics, r/CNC, r/Fanuc, r/KUKA, r/Cognex, r/labview), OEM service bulletins and changelogs, OEM service manuals

how to clear KLA SP haze TIR clipping flag at the wafer edge exclusion zone on Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 comes up often enough on the shop floor and in the OEM service bulletins that there is a stable recovery pattern. My first step on any semiconductors fault is to read the alarm history before touching the reset button - last week the cell controller hit this exact alarm during a tool change and the recovery path is mostly known, the OEM manual just buries it under three layers of cross-referenced parameter tables.

What how to clear kla sp haze tir clipping flag at the wafer edge exclusion zone actually involves on Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026

On Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 on a fresh callout the tools I crack open first are Onto Discover defect-source-analysis (DSA) tool, Verity OES / spectral-fit utility for ellipsometry, Bruker NanoScope Analysis software for AFM scan review. Each of these surfaces a different layer of the fault - keep at least the first one in your fault-history notebook so the next time this happens you do not start cold.

For verification on Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026, the methods that survive contact with a real second-shift production workload are compare Archer overlay raw-residual against golden-baseline before lot release and validate metrology tool floor vibration with PCB Piezotronics scan < 100 micro-g RMS. Anything less than that and you are shipping on vibes.

Authoritative sources for Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 that I cross-reference before committing to a fix: hitachi-hightech.com, semi.org/standards, ontoinnovation.com. OEM marketing brochures and trade-press writeups are signal, not ground truth.

The rest of this page is the structured fix path. Start with diagnose, then remediation, then the automation options so you do not have to do this by hand the next time it surfaces. Verify and safety sections at the end are the discipline that keeps the fix from regressing the next time you open the cabinet.

Diagnose first, fix second

Second pass: open the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 controller diagnostic panel and read the alarm history or fault stack for the failing window. Most modern industrial controllers surface a fault trail (the controller alarm history, the OEM diagnostic interface, the fab MES event log, the cell controller PLC fault table). The alarm history tells you whether the fault was a real condition, a teammate changing a parameter or DI mapping in the same minute, or an OEM-side firmware quirk. Many SRVO or AXIS faults trace to a parameter-level change pushed in the same engineering session in the previous hour - the fault trail makes that obvious without guesswork.

Third pass: read the alarm code and the alarm message like an x-ray of your Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 cell. Servo faults (SRVO-023 servo overcurrent, SRVO-068 overheat, SRVO-014 motor overload) point at the drive, the cable, or the motor itself - 023 = instantaneous overcurrent during accel, 014 = sustained thermal overload during a heavy duty cycle, 068 = ambient or coolant fault on the drive heatsink. Axis or motion faults (4078 absolute position lost, OT001 over-travel, EX1043 spindle alarm) point at encoder battery, hardstops, or the spindle drive. Vision faults (Cognex In-Sight 5403 timeout, 5404 illumination, 5410 acquisition) point at trigger, lighting, or the GigE link. Cross-reference the alarm code against the OEM fault-code list - SCPI instruments will return the same hex code via SYST:ERR? that the front panel shows. If the same alarm cycles between SRVO-023 and SRVO-068 over a tight loop, the duty cycle is exceeding the drive thermal envelope - back off the feedrate or add a duty-cycle dwell.

Fifth: replay the failing run against a second axis or a second controller on the same Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 cell. The point is to isolate "this drive" from "this controller" from "the whole cell." If a teammate identical sister-machine works but yours does not, the failure is local to the parameter set or the encoder cable. If the same program faults on every controller in the same cell, you have a cell-wide config change or an OEM-side firmware quirk. Pin the controller firmware version explicitly while you do this: the controller About panel, the firmware hash in the parameter dump, or the system version returned by a SCPI *IDN? query. The version pin is what isolates "the OEM update broke us" from "this machine is on an older firmware than the rest of the cell."

Field notes from real Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 callouts

My standing rule on any Semiconductors ticket is to baseline with KLA SensArray temperature/dose wireless wafer before touching a single wire, half the "failed" parts I have replaced over the years were not actually failed. Vendor portals like spie.org are a starting point for Semiconductors questions, never the final word. The integrator forums are where the ugly edge cases actually get diagnosed.

I trust `check AFM laser sum signal > 3 V on cantilever-detector alignment screen` more than any green light on a Semiconductors faceplate; the underlying telemetry never sugar-coats what the actuator really did. On any Semiconductors fault inside Semiconductors, the first three questions I ask are: which firmware rev, which I/O card, and what was the last commissioning change. Defaults drift between releases.

Tools I actually reach for

For most Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 faults I start with vibration spectrum analyzer (PCB Piezotronics) for AFM floor check, fall back to Bruker NanoScope Analysis software for AFM scan review, KLA-Tencor MetroLink data analysis client, Hitachi CG-series CD-SEM service console (column vacuum / beam page), KLA Klarity Defect data analysis suite when vibration spectrum analyzer (PCB Piezotronics) for AFM floor check cannot surface the answer, and keep Onto Innovation NovaScan recipe editor and fit-quality viewer handy for the cases where neither answers. That ordering is not academic - it matches the layers of the fault as they tend to surface, so the cheapest signal lands first and the heavier tooling only comes out when the simpler answer does not hold up. My muscle-memory shortcut for this is to run the first tool while the alarm screen is still open, not after I have already cycled controller power.

Verification I run before I call it fixed

Before I mark a Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 fault resolved, the verification loop below is what I actually run. Each step proves a different layer is green, and the order matters - the cheaper checks gate the more expensive ones.

check AFM laser sum signal > 3 V on cantilever-detector alignment screen

If that one comes back clean, move to the next check. If it does not, stop and dig in there before layering more verification on top of a red signal.

validate metrology tool floor vibration with PCB Piezotronics scan < 100 micro-g RMS

If that one comes back clean, move to the next check. If it does not, stop and dig in there before layering more verification on top of a red signal.

confirm CD-SEM stage repeatability via cross-wafer 9-point measurement on golden wafer

If that one comes back clean, move to the next check. If it does not, stop and dig in there before layering more verification on top of a red signal.

run NovaScan ellipsometer fit and verify R-squared >= 0.999 on monitor wafer

If that one comes back clean, move to the next check. If it does not, stop and dig in there before layering more verification on top of a red signal.

run KLA SP-series qualification wafer (PSL) and confirm capture rate against gold record

Only when every line above runs clean do I close the loop and update my fault-history notebook with the timestamps.

Where I check first when the docs disagree

When two sources contradict each other on a Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 detail, the disambiguation order I lean on is stable. I usually check spie.org for the ground-truth view on this part of Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026. I usually check ontoinnovation.com for the ground-truth view on this part of Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026. I usually check kla.com for the ground-truth view on this part of Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026. I usually check semi.org/standards for the ground-truth view on this part of Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026. OEM marketing brochures and trade-press writeups are signal, not ground truth, and I treat them as such until the references above either confirm or contradict the claim.

Solution-focused remediation path

Start by sorting the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 fault into one of three buckets, because roughly 80% of cases fall here. Bucket one is electrical / drive: instantaneous overcurrent, sustained overload, drive overheat, bus undervoltage, or a phase-loss event. Bucket two is mechanical / motion: encoder battery low, absolute position lost, over-travel, hardstop hit, or a vibrated-loose cable. Bucket three is recipe / parameter / I/O: the program calls a tool that is not loaded, the work offset is wrong, a DI is mapped to a disconnected sensor, or a vision job version has drifted. Pick the bucket first, then act. Before you act, capture a baseline photo of the alarm screen plus the controller hour-meter so you can prove whether the fix actually moved the needle. Decision point: if the alarm is intermittent and the cell is under an OEM service contract, open the OEM hotline first - OEM phone support beats hours of speculative debugging on cost and on liability if the alarm recurs and trips a safety-related shutdown.

If the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 symptom started after an overnight firmware update, a drive swap, or a parameter edit, treat firmware and parameter set as the prime suspect. Roll the controller back to the previous firmware if the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 OEM supports rollback (most do via the maintenance bootloader). Restore the saved parameter set from your last known good backup (Fanuc all-parameter PUNCH OUT, KUKA archive, Cognex In-Sight job export) and rerun the program. If both rolled-back firmware and restored parameter set still fault with the same alarm and the same drive, you have a hardware-level or wiring issue. Decision point: if the rolled-back firmware still faults and the cell is under an OEM service contract, open the OEM hotline with the alarm history dump; on an out-of-warranty cell the path is the OEM forum or r/semiconductors with a minimal reproduction. Save the working firmware revision to your notes so the next rollback is a one-line "pin to firmware X."

When the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 fault tracks to communications failures, fieldbus drops, or vision-trigger misses from the upstream station (the upstream PLC, the cell controller, the vision system), treat the integration plane as suspect. Open the fieldbus log on the upstream controller (the PLC EtherCAT diagnostic, the Profinet device status, the cell controller IO scan) and read the link status the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 node actually returned - most "vision did not trigger" reports are actually "trigger fired but the vision job rejected the part and the PLC stalled waiting for a Pass." Verify the connected node is still online (the OEM diagnostic shows green link), the trigger event is what you think it is, and the cycle interlocks are not blocking on a stale handshake. Decision point: if the trigger is firing but Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 is missing it, throttle the cycle (bump the dwell timer, slow the conveyor, add a debounce in the PLC) and re-run. Verify the connected fieldbus drop is the right one - a common foot-gun is the sister-station drop being patched to the wrong port at the cabinet.

Automate this fix so you do not do it twice

Codify the firmware revision pin and rollback as a single notes entry

Once a stable firmware revision is identified for the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026, write the revision string, the build hash, and the parameter set state to a fault-history notebook entry with the date in the title. Reproducible rollback is then a single OEM utility load plus a parameter restore. Pin the parameter set state explicitly so an OEM-side default change does not silently shift behavior under you. Stage the notebook entry next to a checklist that lists the failing photo, the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 alarm history dump (if any), and the OEM case number; the second time the cell faults at 9 a.m. you do not want to be rediscovering which firmware revision was actually green.

# Fault-history notebook template (semiconductors)
Date: 2026-06-01
Controller: semiconductors
Working firmware: 30iB-Plus 02.20 (Build hash: a1b2c3d)
Cell: Line 4 Cell B
Machine serial: SN-semiconductors-12345
Failing photo: ~/notes/semiconductors-2026-06-01.jpg
OEM case: OEM-semiconductors-12345
Rollback path: load previous firmware from OEM utility, master OFF, restore parameter archive, power up

Scrape Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 controller alarm history + fieldbus log via scheduled job

For the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026, cell faults usually surface as drive alarms, fieldbus dropouts, or vision-trigger misses before a full line stoppage. A weekly scheduled job that exports the last 7 days of these events to CSV gives you a paper trail to correlate with firmware updates, parameter edits, and OEM bulletins without staring at the HMI live. Register the task via cron on a plant-floor logger PC (Linux IPC), Windows Task Scheduler (schtasks /create /XML) on an engineering workstation, or a GitHub Actions schedule against a cell-controller API, then write the CSV to a plant file share or the fab MES for retention. Subscribe a simple dashboard (Grafana with a CSV source, Ignition with a tag history, the fab MES OEE report) to the same bucket so alarm events from every Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 controller converge on a single view without per-cell HMI clicking.

# Export the controller alarm history via the OEM API (if supported)
curl -X POST https://controller.plant.local/api/v1/alarm_history \ -H "Authorization: Bearer $CONTROLLER_TOKEN" \ -H "Accept: application/json" \ -d '{"start_date":"2026-05-25","end_date":"2026-06-01"}' \ -o semiconductors-alarm-history.json
# Export the cycle history for the last 7 days
curl -G https://controller.plant.local/api/v1/cycles \ -H "Authorization: Bearer $CONTROLLER_TOKEN" \ --data-urlencode "oldest=$(date -d '7 days ago' +%s)" \ -o semiconductors-cycles.json

Automate Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 parameter + I/O mapping snapshots via OEM utility or API

On the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026, regular parameter and I/O snapshots catch silent parameter drift, recipe edits, and stale safety-PLC permissions well before the cell starts faulting in prod. Pair OEM health checks (the OEM diagnostic SDK, the controller users API, the fieldbus device listing) with a license-validity check so both OEM-side and cell-side issues land in one folder. Run the scheduled task on a control-plane logger PC (a hardened IPC at the cell, a GitHub Actions runner against the cell-controller VPN, a small Linux box at the line) under a tightly scoped service account that mirrors the maintenance role.

# List cell operator roster + safety-PLC roles
curl -H "Authorization: Bearer $CONTROLLER_TOKEN" \ https://controller.plant.local/api/v1/operators \ > semiconductors-operators.json
# List active fieldbus drops + their last-link-up timestamp
curl -H "Authorization: Bearer $CONTROLLER_TOKEN" \ https://controller.plant.local/api/v1/fieldbus_drops \ > semiconductors-fieldbus.json
# Validate the maintenance license token itself
curl -H "Authorization: Bearer $CONTROLLER_TOKEN" \ https://controller.plant.local/api/v1/me \ > semiconductors-me.json

Common pitfalls and what to watch for

Controller firmware updates during an active alarm are the textbook way to break a Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 cell further, and the trap catches experienced techs because the release notes look like they describe exactly the alarm at hand. Never accept a major firmware version bump while you are in the middle of debugging, never push a beta firmware unless the release notes tie it to a specific service bulletin for your symptom, and never roll forward when a rollback is available. Skipping a required parameter migration leaves a known regression path open even after the immediate fix, so check the deprecation timeline on the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 maintenance bulletin before deciding to wait.

The other half is trusting the OEM service bulletin verdict by itself. OEM bulletin indexes can miss regional issues that only hit one plant batch, the Trust Center will not flag a fieldbus-driver degradation, and the controller event-log entries can lag several minutes behind the actual fault. Cross-reference the OEM controls-community forum, r/semiconductors, the failing photo timestamps, and the on-screen alarm narrative before committing to a destructive remediation on Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026.

Verify the fix worked

• Reproduce the original faulting cycle against Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 on the same cell AND a sister cell with the same recipe. If the alarm or fault code still surfaces on any cell, you have not fixed it.
• Watch for 24 to 48 hours via the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 controller alarm history + the fieldbus log + your fault-history notebook. Cached fault states and stale fieldbus link state mask slow-burn drift and intermittent fieldbus issues.
• Smoke-test under realistic load: replay the cycle against a test workpiece for at least 30 minutes at your normal production feedrate, log success / alarm and the timestamp per attempt to a notes file.
• Capture the new state in a fault-history notebook entry so the next time this happens you do not rediscover it. Note firmware revision + parameter set + I/O mapping + failing photo + verbatim alarm string + fix applied. Push to a plant-wide maintenance wiki if your plant uses one.
• If the fix involved a maintenance-token rotation or a parameter set change, commit the new token to your password manager and photograph the parameter dump for archival.

Safety, rollback, blast radius

• Test in a Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 maintenance mode or on a sister cell first before any change that touches the production cell. Snapshot the firmware revision, the parameter set, the I/O mapping, and the safety-PLC permissions before changing anything.
• Apply the principle of least surprise when granting teach-pendant access or safety-PLC permissions. Review the operator roster against the people who actually need access - extra teach pendants are extra blast radius.
• Use idempotent cycles where the Semiconductors, Metrology Equipment Error Codes (KLA-Tencor SP-Series, Hitachi CD-SEM, Bruker AFM, Onto Innovation), 2026 controller supports it (the OEM cycle-id de-dupe, external id keys on MES records) so a re-run cycle does not double-count parts or duplicate scrap records.
• Know your rollback path. Firmware rollback is a one-line OEM utility load; a maintenance-token rotation is reversible if you kept the old token in the password manager during cutover; a parameter set change is reversible only if you saved the previous archive.
• For cell-wide or plant-wide changes, line up a maintenance window with production scheduling before pushing through the OEM utility.

FAQ

Related fixes

Related guides worth a look while you sort this one out:

• how to clear Hitachi CD-SEM stage-XY-not-at-target alarm after emergency stop
• how to clear KLA SP5 wafer pre-align mark-not-found alarm on production lot
• how to interpret KLA Surfscan SP-series haze-channel out-of-control trend across days
• how to recover Onto/Rudolph S3000 wafer-edge bevel-inspection no-image alarm
• how to clear Onto Innovation Atlas overlay illumination-intensity-low fault
• how to debug Bruker InsightAFM scan-line-noise above spec after vibration isolation drift